Zirconium and niobium supply Secrets
Zirconium and niobium supply Secrets
Blog Article
Sweeping the lean angle can increase film thickness uniformity and sidewall protection even though also steering clear of substantial energy-reflected neutral species for essential processes.
In-situ optical monitoring and Regulate is available by means of Angstrom’s optical checking & Command package deal.
Concentrate on rotation and carousel indexing Each and every have torque sense, stopping any method challenges as a result of slips or jams in rotation.
In-situ ellipsometry delivers vital information on the effectiveness of an optical film whilst it really is getting deposited.
We use cookies to ensure you hold the smoothest knowledge navigating our web-site. This incorporates gathering non-personally identifiable information and facts in the course of your searching session, like: which webpages you search, what products you review And exactly how you connect with Angstrom.
Variable angle stages allow for very highly effective slender film methods. Nonetheless, certainly one of its largest problems is reproducibility. The substrate is often set at an extremely oblique angle in relation on the source, as well as movies are incredibly sensitive to the precision of this angle.
Angstrom went to terrific lengths to refine the tolerances of the tilt angle, bettering it from a variation of as much as a complete degree on non-Angstrom methods I’ve accustomed to lower than 0.
Generally, a QCM is used to calibrate an Original deposition charge just before finishing the layer thickness beneath time Management with a hard and fast beam latest. Shuttering the crystal will significantly lengthen its operating life span throughout long processes or on methods which has a load lock.
IBSD processes also can utilize a secondary ion resource for substrate cleaning and energetic guide, substrate heating for reactive deposition, and in-situ optical monitoring or ellipsometry for essential layer thickness termination.
All common Reticle® platforms involve an additional gridless close-Corridor ion resource with hollow cathode neutralizer.
one diploma. Those people splendidly slim tolerances let us to frequently build incredibly exact nanostructures. I can say wholeheartedly the product or service and repair Angstrom Engineering® delivered Titanium for deposition processes has become awesome.
Self-aligned ion optics are configured specifically for the specified deposition needs and geometry of the course of action.
Angstrom Engineering’s Reticle® programs give a transform-key solution for people wanting to recognize any optical style right into a large-efficiency film.
Dynamic uniformity shaping is realized utilizing a flux correction shield amongst the deposition source plus the substrate.
Thoughtful design and style in the ion beam focusing optics confines the beam completely to the area with the target, eliminating any hazard of contamination.